Title :
Microdac - a novel approach to measure in situ deformation fields of microscopic scale
Author :
Vogel, D. ; Schubert, A. ; Faust, W. ; Dubek, R. ; Michel, B.
Author_Institution :
Fraunhofer Institute of Reliability and Microintegration
Keywords :
Assembly; Capacitive sensors; Displacement measurement; Electron optics; Optical imaging; Optical materials; Optical microscopy; Packaging; Pixel; Scanning electron microscopy;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888250
