Title :
Influence of CPW Dimension on Quality Factor in Microwave Measurement
Author :
Cao, Xin ; Wu, Yunqiu ; Tang, Zongxi ; Zhang, Biao
Author_Institution :
Sch. of Electron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
In this paper, open CPW (coplanar wave guide) resonator structure is utilized to measure the complex permittivity of thin film materials. The optimal width of CPW resonator and the metal plane thickness are determined. Quasi-TEM analysis and electromagnetic simulation are adopted. The results show that, high quality factor has been achieved and measurement error has been remarkably reduced and the measurement procedure has been greatly simplified.
Keywords :
Q-factor; coplanar waveguides; ferroelectric thin films; measurement errors; microwave measurement; permittivity; CPW dimension; CPW resonator; complex permittivity; coplanar waveguide resonator structure; electromagnetic simulation; measurement error; metal plane thickness; microwave measurement; optimal width; quality factor; quasi-TEM analysis; thin film material; Conductors; Coplanar waveguides; Materials; Metals; Microwave measurements; Permittivity measurement; Q factor;
Conference_Titel :
Computer and Information Technology (CIT), 2012 IEEE 12th International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4673-4873-7
DOI :
10.1109/CIT.2012.204
