A BE-SOI MEMS for inertial measurement in geophysical applications

Author

Andò, B. ; Baglio, S. ; Marletta, V. ; Savalli, N. ; Trigona, C. ; Carbone, D. ; Patanè, D. ; Rapisarda, S. ; Zuccarello, L.

Author_Institution

D.I.E.E.S., Univ. of Catania, Catania, Italy

fYear

2010

fDate

3-6 May 2010

Firstpage

1326

Lastpage

1330

Abstract

In this paper an inertial transducer developed in BESOI MEMS technology is presented. The device is suitable for low frequency observation and could represent an interesting solution to implement low cost monitoring system for applications requiring a high amount of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. Moreover, an experimental sensor prototype is proposed and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.

Keywords

geophysical equipment; inertial systems; microsensors; transducers; BE-SOI MEMS; geophysical applications; inertial measurement; inertial transducer; low frequency observation; Costs; Frequency; Geophysical measurements; Microelectromechanical devices; Micromechanical devices; Monitoring; Sensor phenomena and characterization; Transducers; Volcanoes; Wireless sensor networks; BE-SOI; MEMS; inertial sensor; low-cost; volcanic monitoring;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2010 IEEE

Conference_Location

Austin, TX

ISSN

1091-5281

Print_ISBN

978-1-4244-2832-8

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2010.5488022

Filename

5488022