Title :
A table-based time-domain simulation method for oversampled microelectromechanical systems
Author :
Wu, Jiangfeng ; Carley, L. Richard
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper describes a table-based behavioral modeling method and an efficient transient simulation method for oversampled MEMS systems. A system is represented by a set of coupled ordinary differential equations (ODEs) numerically described by table-based macromodels. Cubic spline interpolation is used to evaluate the model functions. The instant settling approximation and the explicit ODE solver are employed to enable efficient transient simulation. These methods are used to simulate a delta-sigma MEMS accelerometer and demonstrate high simulation efficiency
Keywords :
accelerometers; delta-sigma modulation; differential equations; electronic engineering computing; interpolation; mechanical engineering computing; micromechanical devices; microsensors; splines (mathematics); time-domain analysis; transient analysis; coupled ordinary differential equations; cubic spline interpolation; delta-sigma MEMS accelerometer; explicit ODE solver; high simulation efficiency; instant settling approximation; microelectromechanical systems; model functions evaluation; oversampled MEMS systems; table-based behavioral modeling method; table-based macromodels; table-based time-domain simulation method; transient simulation method; Analytical models; Circuit simulation; Clocks; Computational modeling; Differential equations; Mathematical model; Microelectromechanical systems; Micromechanical devices; Sensor systems; Time domain analysis;
Conference_Titel :
Behavioral Modeling and Simulation, 2000. Proceedings. 2000 IEEE/ACM International Workshop on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7695-0893-6
DOI :
10.1109/BMAS.2000.888362
