Title :
Designing circular CMUT cells using CMUT biasing chart
Author :
Koymen, Hayrettin ; Atalar, Abdullah ; Oguz, H.
Author_Institution :
Electr. & Electron. Eng. Dept., Bilkent Univ., Ankara, Turkey
Abstract :
A very accurate equivalent circuit model for circular CMUT cell is recently proposed. As a consequence of this model, the operating characteristics of the cell is derived and presented as a biasing chart for CMUTs. We discuss these operating characteristics and show how the coupling coefficient can be derived from the model. We present an analysis of receiver performance of a CMUT cell. We also demonstrate how to design cells for fixed bias voltage but for different static depression.
Keywords :
capacitive sensors; ultrasonic transducers; CMUT biasing chart; capacitive micromachined ultrasonic transducer; circular CMUT cell; coupling coefficient; equivalent circuit model; fixed bias voltage; Acoustics; Couplings; Equivalent circuits; Force; Integrated circuit modeling; Parasitic capacitance; Resonant frequency;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0244
