Abstract :
A cantilever composed of a nonpiezoelectric substrate covered by a piezoelectric thin film, sandwiched between electrodes is considered. A tipmass m is present at the tip of the cantilever, and its influence in the total capacitance is determined. For two identical devices, one with a large tipmass, the other without tipmass, a set of 12 measurements of capacitances at certain frequencies has been developed that allows calculation of the elastic modulus, piezoelectric and dielectric constants, and the specific density of the piezoelectric film, without touching or exerting a force on the device. The accuracy of these calculations as function of the tipmass to beam mass ratio is presented.
Keywords :
cantilevers; capacitance; elastic moduli; nondestructive testing; permittivity; piezoelectric thin films; substrates; beam mass ratio; cantilever; dielectric constants; elastic modulus; nondestructive method; nonpiezoelectric substrate; piezoelectric constants; piezoelectric thin film; specific density; tipmass; Accuracy; Capacitance; Dielectric measurement; Frequency measurement; Materials; Piezoelectric devices; Resonant frequency;
