Nondestructive method for measurement of piezoelectric and dielectric constant, elastic modulus and specific density of thin film piezoelectric cantilevers

A cantilever composed of a nonpiezoelectric substrate covered by a piezoelectric thin film, sandwiched between electrodes is considered. A tipmass m is present at the tip of the cantilever, and its influence in the total capacitance is determined. For two identical devices, one with a large tipmass, the other without tipmass, a set of 12 measurements of capacitances at certain frequencies has been developed that allows calculation of the elastic modulus, piezoelectric and dielectric constants, and the specific density of the piezoelectric film, without touching or exerting a force on the device. The accuracy of these calculations as function of the tipmass to beam mass ratio is presented.