• DocumentCode
    2688425
  • Title

    Design of the high-Tc microcoil

  • Author

    Kvasov, Serguey B. ; Firsov, Nikolay I. ; Novikov, Ilya L.

  • Author_Institution
    Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    48
  • Lastpage
    52
  • Abstract
    Methods of manufacturing for microspools on thick films are discussed. It is shown, that the traditional method of milling for thick films YBa2Cu3O7-x (laser, chemical) for the magnification density of coils in a microspiral, has restrictions. How to remove these restrictions is examined. The topology of microspools for sensors of electromagnetic oscillations with high selectivity is designed and the method of manufacturing is presented
  • Keywords
    barium compounds; etching; high-temperature superconductors; moulding; superconducting coils; thick films; yttrium compounds; HTSC microcoil design; HTSC powder; YBa2Cu3O7-x films; YBaCuO; anisotropic etching; electromagnetic oscillations sensor; etched trenches; high selectivity; manufacturing methods; microgrooves; microspool morphology; photomask; thick films; Ceramics; Chemical lasers; Critical current; Magnetic fields; Magnetic films; Milling; Pulp manufacturing; Spirals; Substrates; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2000. EDM 2000. Siberian Russian Student Workshops on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    5-7782-0291-1
  • Type

    conf

  • DOI
    10.1109/SREDM.2000.888541
  • Filename
    888541
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2688425