DocumentCode :
2688425
Title :
Design of the high-Tc microcoil
Author :
Kvasov, Serguey B. ; Firsov, Nikolay I. ; Novikov, Ilya L.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
fYear :
2000
fDate :
2000
Firstpage :
48
Lastpage :
52
Abstract :
Methods of manufacturing for microspools on thick films are discussed. It is shown, that the traditional method of milling for thick films YBa2Cu3O7-x (laser, chemical) for the magnification density of coils in a microspiral, has restrictions. How to remove these restrictions is examined. The topology of microspools for sensors of electromagnetic oscillations with high selectivity is designed and the method of manufacturing is presented
Keywords :
barium compounds; etching; high-temperature superconductors; moulding; superconducting coils; thick films; yttrium compounds; HTSC microcoil design; HTSC powder; YBa2Cu3O7-x films; YBaCuO; anisotropic etching; electromagnetic oscillations sensor; etched trenches; high selectivity; manufacturing methods; microgrooves; microspool morphology; photomask; thick films; Ceramics; Chemical lasers; Critical current; Magnetic fields; Magnetic films; Milling; Pulp manufacturing; Spirals; Substrates; Thick films;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials, 2000. EDM 2000. Siberian Russian Student Workshops on
Conference_Location :
Novosibirsk
Print_ISBN :
5-7782-0291-1
Type :
conf
DOI :
10.1109/SREDM.2000.888541
Filename :
888541
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2688425
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