Title :
Design of 1m2 order single-layer slotted waveguide array for plasma excitation including the effect of vacuum window using the GSM-MoM analysis
Author :
Hirano, Takuichi ; Hirokawa, Jiro ; Ando, Makoto ; Ide, Tetsuya ; Sasaki, Atsushi ; Azuma, Kazufumi ; Nakata, Yukihiko
Author_Institution :
Dept. of Int. Dev. Eng., Tokyo Inst. of Technol., Japan
Abstract :
A unit-cell of the array with vacuum window, except plasma and chamber, is analyzed by the GSM-MoM analysis and the array is designed for uniform aperture illumination. Uniform aperture illumination on the quartz glass strips is observed by the near field measurement using 1/5 scale model antenna, and validity of the analysis/design is confirmed. Aperture EM field distribution is measured by using 1/5 scale model antenna at 12.25GHz, and good uniformity is observed.
Keywords :
S-matrix theory; antenna radiation patterns; electromagnetic fields; method of moments; slot antenna arrays; 12.25 GHz; EM field distribution; GSM-MoM analysis; generalized scattering matrix-method of moments analysis; near field measurement; plasma excitation; quartz glass strips; single-layer slotted waveguide array; uniform aperture illumination; vacuum window; Apertures; Electromagnetic scattering; Electromagnetic waveguides; Glass; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Plasma waves; Windows;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2005 IEEE
Print_ISBN :
0-7803-8883-6
DOI :
10.1109/APS.2005.1552354
