A monolithic phased array using 3-bit DMTL RF MEMS phase shifters

This paper presents a phased array system designed at 15 GHz employing 3-bit distributed MEMS transmission line (DMTL) type phase shifters which are monolithically integrated with the feed network of the system and the radiating elements on the same substrate. The phase shifter can give 0deg-360deg phase shift with 45deg steps at 15 GHz which is used to obtain various combinations of progressive phase shift in the excitation of radiating elements. The phased array is composed of four linearly placed microstrip patch antennas. In order to monolithically integrate the patch antennas and phase shifters, tapered lines with low return loss from microstrip to coplanar waveguide (CPW) have been designed. The design of the phased array system and its components is given. Since the DC biasing schema of a MEMS system is also an important issue in terms of the RF losses, the paper also addresses the effect of the bias lines on the loss characteristics of the phase shifters. Moreover, the process steps, which are used in the fabrication of the phased array, are also summarized