DocumentCode :
2689641
Title :
Thermal oxidation of ultra thin palladium (Pd) foils at room conditions
Author :
García-Serrano, O. ; Andraca-Adame, A. ; Baca-Arroyo, R. ; Peña-Sierra, R. ; Romero-Paredes R, G.
Author_Institution :
Dept. of Electr. Eng., CINVESTAV-IPN, Mexico City, Mexico
fYear :
2011
fDate :
26-28 Oct. 2011
Firstpage :
1
Lastpage :
5
Abstract :
The formation and growth of Palladium Oxide (PdO) onto ultra thin Pd foil by thermal oxidation (TO) is discussed. TO is a flexible method to study the theory of volumetric Pd oxidation, considering the interfaces O2-PdO and PdO-Pd phenomena. The kinetic of the PdO growth on ultra thin Pd foil, clearly shows that oxidation process is governed by a parabolic law, which is directly related to temperature and oxidation time parameters. Oxide thickness in the range of 30 nm to 60 μm were development by TO. The XRD analysis on samples with different oxide thickness have shown a preferential growth at 2 = 33.6° explained by the highest surface energy for this plane. The peak located at 2 = 33.9° corresponding to (101) PdO direction, is the responsible of 2 allowed Raman modes reported for PdO, where the oxygen-phonon has a parallel motion to x and c axis. Ellipsometric measurement (EM) was a useful technique to study the early oxidation stage in a Pd foil. A theoretical study was done considering an existent 1 nm PdO layer. Hall measurements demonstrate the degenerated semiconductor behavior of PdO, because of the ultra short band gap in PdO, of around 0.8 eV.
Keywords :
Raman spectra; X-ray diffraction; ellipsometry; metallic thin films; oxidation; palladium; surface energy; (101) PdO direction; Pd; Raman modes; XRD analysis; band gap; ellipsometric measurement; oxygen-phonon; palladium oxide; parabolic law; preferential growth; semiconductor behavior; size 30 nm to 60 mum; surface energy; temperature 293 K to 298 K; thermal oxidation; ultrathin palladium foils; Atomic layer deposition; Oxidation; Palladium; Surface treatment; Temperature measurement; X-ray scattering; Metal oxide; Palladium oxide; Thermal oxidation; cationic vacancy; oxidation rate; p-semiconductor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering Computing Science and Automatic Control (CCE), 2011 8th International Conference on
Conference_Location :
Merida City
Print_ISBN :
978-1-4577-1011-7
Type :
conf
DOI :
10.1109/ICEEE.2011.6106122
Filename :
6106122
Link To Document :
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