Identification of the coupling forces ratio in silicon vibratory MEMS gyroscopes

This paper reports on the theory, implementation and experimental results of a novel method used to identify the coupling forces ratio in MEMS vibratory gyroscopes. This identification method is based on the force-displacement phase relationships in second-order spring-mass system and fourth-order coupling system. Experimental data under different temperature and vacuum indicates that the sensitivity of coupling forces to environmental condition can be observed by using this proposed method. The method can be applied not only to linear vibratory gyros, but also to other vibratory MEMS gyroscope structures, as long as the drive and sense-modes satisfies the dynamics of typical spring-mass systems.