• DocumentCode
    2690073
  • Title

    Pick-and-place nanomanipulation with three-dimensional manipulation force microscopy

  • Author

    Xie, Hui ; Acosta, Juan Camilo ; Haliyo, Dogan Sinan ; Régnier, Stéphane

  • Author_Institution
    Inst. des Syst. Intelligents et Robot. (ISIR), Univ. Pierre et Marie Curie-Paris VI, Paris, France
  • fYear
    2009
  • fDate
    10-15 Oct. 2009
  • Firstpage
    1333
  • Lastpage
    1338
  • Abstract
    Applications of the conventional atomic force microscope (AFM) succeeded in manipulating nanoparticles, nanowires or nanotubes by widely used pushing or pulling operations on a single plane. However, pick-and-place nanomanipulation is still a challenge in the air. In this paper, a modified AFM, called three-dimensional (3D) manipulation force microscope (3DMFM) was developed, aiming to achieve the pick-and-place in the air. This system mainly consists of two microcantilevers and each is quipped with a nanopositioning device and an optical lever, constructing a nanotweezer with capabilities of picking and releasing nanoobjects with force sensing. Before the 3D manipulation, one of the cantilevers is employed to position nanoobjects and locate the tip of another cantilever by image scanning, then these two cantilevers fit together as a nanotweezer to grasp, transport and place the nanoobjects with real-time force sensing. In pick-and-place experiments, silicon nanowires (SiNMs) with different diameters were manipulated and 3D nanowire crosses were achieved. 3D nanomanipulation and nanoassembly in the air could become feasible through the newly developed 3DMFM.
  • Keywords
    atomic force microscopy; cantilevers; force sensors; image scanners; manipulators; micromechanical devices; nanopositioning; nanowires; air 3D nanomanipulation; air nanoassembly; atomic force microscope; force sensing; image scanning; microcantilevers; nanopositioning device; nanotweezer; optical lever; pick-and-place nanomanipulation; silicon nanowires; three dimensional manipulation force microscopy; Adhesives; Atomic force microscopy; Force control; Intelligent robots; Nanopositioning; Nanowires; Optical devices; Optical sensors; Scanning electron microscopy; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots and Systems, 2009. IROS 2009. IEEE/RSJ International Conference on
  • Conference_Location
    St. Louis, MO
  • Print_ISBN
    978-1-4244-3803-7
  • Electronic_ISBN
    978-1-4244-3804-4
  • Type

    conf

  • DOI
    10.1109/IROS.2009.5354719
  • Filename
    5354719