• DocumentCode
    2691588
  • Title

    High Performance Monolithic Power Amplifier Using a Unique Ion Implantation Process

  • Author

    Wang, S.K. ; Wang, K.G. ; Chang, C.D.

  • fYear
    1986
  • fDate
    2-4 June 1986
  • Firstpage
    803
  • Lastpage
    805
  • Abstract
    State-of-the-art X-band power FETs and monolithic amplifiers have been fabricated by a high yield planar process using a unique double-peaked implant profile. A 1-mm FET has achieved 40 percent power added efficiency with 720 mW output power and 6.3 dB gain at 10 GHz. A two-stage monolithic amplifier has delivered 2.2 W output power at 9.5 GHz for a record 0.6 W/mm power density. The monolithic amplifier chips have also achieved 20 percent dc-yield and 5 percent uniformity in I/sub DSS/ and V/sub PO/.
  • Keywords
    Doping profiles; FETs; Fabrication; Gallium arsenide; High power amplifiers; Implants; Ion implantation; Power amplifiers; Power generation; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 1986 IEEE MTT-S International
  • Conference_Location
    Baltimore, MD, USA
  • ISSN
    0149-645X
  • Type

    conf

  • DOI
    10.1109/MWSYM.1986.1132313
  • Filename
    1132313