DocumentCode
2692132
Title
The challenges and limitations on triple level cell geometry and process beyond 20 nm NAND Flash technology
Author
Lee, Yunbong ; Park, Byoungjun ; Yun, DaeHwan ; Jeong, YeonJoo ; Kim, Pyoung Hwa ; Park, Ji Yul ; Yang, Hae Chang ; Cho, Myoung Kwan ; Ahn, Kun-Ok ; Koh, Yohwan
Author_Institution
Flash Memory Div., Hynix Semicond. Inc., Cheongju, South Korea
fYear
2010
fDate
16-19 May 2010
Firstpage
1
Lastpage
2
Abstract
This paper investigates the challenges and difficulties of TLC cell geometry and process beyond 20nm NAND technology from the viewpoint of programmed Vth level, new HCI disturbance and charge loss in the highest programmed level.
Keywords
NAND circuits; flash memories; hot carriers; HCI disturbance; NAND flash technology; TLC cell geometry; charge loss; highest programmed level; size 20 nm; triple level cell geometry; Boosting; Electron traps; Electronic mail; Flash memory; Geometry; Hot carrier injection; Human computer interaction; Leakage current; Substrate hot electron injection; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Memory Workshop (IMW), 2010 IEEE International
Conference_Location
Seoul
Print_ISBN
978-1-4244-6719-8
Electronic_ISBN
978-1-4244-7668-8
Type
conf
DOI
10.1109/IMW.2010.5488388
Filename
5488388
Link To Document