Title :
Plasma Enhanced Cvd Method For Simultaneous Deposition On Both Sides Of The Substrate And Lts Application To The In-line Multilayer Deposition System
Author :
Kokaku, Y. ; Inaba, H. ; Kataoka, H. ; Abe, K. ; Sunagawa, M.
Keywords :
Electric potential; Electrodes; Magnetic films; Optical films; Plasma applications; Plasma materials processing; Plasma measurements; Plasma transport processes; Substrates; Voltage;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639285
