Title :
An In-line Vacuum Deposition System Wi[h A Capability Of Compo!ite Fabrication Process On Large Deposition Area
Author :
Kokaku, Y. ; Furusawa, Kazuya ; Abe, Kiyohiko
Keywords :
Fabrication; Liquid crystal displays; Production systems; Vacuum systems;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639287
