A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films

Author

Jang, M.W. ; Lu, M. ; Cui, T. ; Campbell, S.A.

Author_Institution

Dept of Electr. & Comput. Eng, Univ of Minnesota, Minneapolis, MN, USA

fYear

2009

fDate

22-24 June 2009

Firstpage

29

Lastpage

30

Abstract

In summary, this paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes can be switched at low voltage and high frequency. The measured DC pull-in voltages ranged from 0.9V to 4.8 V depending on the length of the switch. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high-performance MEMS/NEMS. This work was supported by DARPA under SPA WAR grant number N66001-07-1-2060.

Keywords

carbon nanotubes; microactuators; nanoelectromechanical devices; DARPA; MEMS; NEMS actuator; SPA WAR grant number N66001-07-1-2060; SWNT membranes; carbon nanotube layer; fixed-beam switches; frequency 1.6 GHz; layer composite films; nanoelectronics; time 600 ps; voltage 0.9 V to 4.8 V; wavelength 300 nm; Actuators; Biomembranes; Carbon nanotubes; Delay; Frequency; Length measurement; Low voltage; Nanoelectromechanical systems; Nanoelectronics; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2009. DRC 2009

Conference_Location

University Park, PA

Print_ISBN

978-1-4244-3528-9

Electronic_ISBN

978-1-4244-3527-2

Type

conf

DOI

10.1109/DRC.2009.5354904

Filename

5354904