Title :
A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films
Author :
Jang, M.W. ; Lu, M. ; Cui, T. ; Campbell, S.A.
Author_Institution :
Dept of Electr. & Comput. Eng, Univ of Minnesota, Minneapolis, MN, USA
Abstract :
In summary, this paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes can be switched at low voltage and high frequency. The measured DC pull-in voltages ranged from 0.9V to 4.8 V depending on the length of the switch. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high-performance MEMS/NEMS. This work was supported by DARPA under SPA WAR grant number N66001-07-1-2060.
Keywords :
carbon nanotubes; microactuators; nanoelectromechanical devices; DARPA; MEMS; NEMS actuator; SPA WAR grant number N66001-07-1-2060; SWNT membranes; carbon nanotube layer; fixed-beam switches; frequency 1.6 GHz; layer composite films; nanoelectronics; time 600 ps; voltage 0.9 V to 4.8 V; wavelength 300 nm; Actuators; Biomembranes; Carbon nanotubes; Delay; Frequency; Length measurement; Low voltage; Nanoelectromechanical systems; Nanoelectronics; Switches;
Conference_Titel :
Device Research Conference, 2009. DRC 2009
Conference_Location :
University Park, PA
Print_ISBN :
978-1-4244-3528-9
Electronic_ISBN :
978-1-4244-3527-2
DOI :
10.1109/DRC.2009.5354904
