DocumentCode
2693540
Title
Chalcogenide semiconductor based sensor for fast NO2 detection
Author
Tsiulyanu, D. ; Marian, S. ; Miron, V. ; Potje-Kamloth, K. ; Liess, H.-D.
Author_Institution
Dept. of Phys., Tech. Univ., Kishinau, Moldova
Volume
2
fYear
2000
fDate
2000
Firstpage
377
Abstract
For the first time if is shown that thin films based on tellurium alloys exhibit high sensitivity to nitrogen dioxide at room temperature. The resistance of the films decreases reversibly in the presence of NO 2. Sensitivity of the device depends on gas concentration and is better at concentrations less than 3 ppm. The response time is considerably short being in the range of 2-3 min
Keywords
chalcogenide glasses; electrical resistivity; gas sensors; nitrogen compounds; semiconductor thin films; tellurium compounds; 2 to 3 min; 20 C; NO2; chalcogenide semiconductor based sensor; fast NO2 detection; gas concentration; high sensitivity; nitrogen dioxide; resistance; response time; room temperature; sensitivity; tellurium alloys; thin films; Automobiles; Combustion; Delay; Electrical resistance measurement; Gas detectors; Nitrogen; Pollution measurement; Temperature distribution; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-5885-6
Type
conf
DOI
10.1109/SMICND.2000.889114
Filename
889114
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