Title :
Optical field characterization using tunneling microstructures
Author :
Dragoman, D. ; Dragoman, M.
Author_Institution :
Nat. Res. & Dev. Inst. in Microtechnol., Bucharest, Romania
Abstract :
For the first time, the amplitude, wavelength and phase of a light source are determined based on microsystems consisting of arrays of tunneling cantilevers
Keywords :
arrays; frequency measurement; light sources; microsensors; optical sensors; optical variables measurement; tunnelling; amplitude; arrays; light source; microsystems; optical field characterization; phase; tunneling cantilevers; tunneling microstructures; wavelength; Bandwidth; Light sources; Microstructure; Optical arrays; Optical interferometry; Phase measurement; Power measurement; Thickness measurement; Tunneling; Wavelength measurement;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889118