Title :
Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers
Author :
Baron, T. ; Lebrasseur, Eric ; Alzuaga, Sebastien ; Haixia Wang ; Bassignot, F. ; Boy, J.-J. ; Ballandras, S. ; Couteleau, L.
Author_Institution :
FEMTO-ST, Univ. de Franche-Comte, Besancon, France
Abstract :
In this work, we propose a Bragg mirror for Quartz resonator at 10MHz. Two processes based on bonding and thinning wafers is proposed. A stack of ten bonding and thinning wafers is realized. Ultrasonic characterization shows the behavior of the Bragg mirror and the evolution versus the number of layer stack. Resonators on such Bragg mirror show less spurious signal but need improvement about quality factor of resonator.
Keywords :
Bragg gratings; bulk acoustic wave devices; crystal resonators; mirrors; ultrasonic transducers; wafer bonding; bonding wafers; frequency 10 MHz; quartz resonator; single-crystal Bragg mirror fabrication; solidly-mounted resonator; spurious signal; thinning wafers; transducers; ultrasonic characterization; Acoustics; Bonding; Gold; Lapping; Mirrors; Silicon;
Conference_Titel :
Ultrasonics Symposium (IUS), 2012 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4673-4561-3
DOI :
10.1109/ULTSYM.2012.0135
