Title :
Nickel doped PZT type ceramics for displacement microsystems
Author :
Miclea, C. ; Tanasoiu, C. ; Spanulescu, S. ; Miclea, C.F.
Author_Institution :
Hyperion Univ., Bucharest, Romania
Abstract :
A soft PZT type material was prepared by the usual ceramic technique and was doped with Ni. Doping levels of about 20 at.% provided piezoelectric materials with improved characteristics. Thus the electromechanical planar coupling coefficient increased to 0.64, the relative dielectric constant to nearly 5500 and the piezoelectric charge constant d33 to over 800·10-12 m/N. Such materials are extremely suitable for actuators and micromotors applications
Keywords :
lead compounds; microactuators; nickel; permittivity; piezoceramics; piezoelectric actuators; PZT:Ni; PbZrO3TiO3:Ni; actuator; dielectric constant; displacement microsystem; electromechanical planar coupling coefficient; micromotor; nickel doped PZT ceramic; piezoelectric charge constant; piezoelectric material; Ceramics; Conducting materials; Dielectric materials; Doping; Micromotors; Milling; Nickel; Piezoelectric actuators; Piezoelectric materials; Temperature;
Conference_Titel :
Semiconductor Conference, 2000. CAS 2000 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5885-6
DOI :
10.1109/SMICND.2000.889137
