Title :
Design and Evaluation of UHF Monolithic Film Resonator - Stabilized Oscillators and Bandpass Filters
Author :
Driscoll, M. ; Moore, R. ; Rosenbaum, J. ; Krishnaswamy, S. ; Szedon, J.
fDate :
May 9 1975-June 11 1987
Abstract :
Monolithic, bulk acoustic wave resonators have been fabricated by sputter-deposition of piezoelectric films into supporting membranes formed in semiconductor substrates.
Keywords :
Acoustic devices; Band pass filters; Biomembranes; Capacitance; Circuits; Electrodes; Film bulk acoustic resonators; Piezoelectric films; Substrates; Voltage-controlled oscillators;
Conference_Titel :
Microwave Symposium Digest, 1987 IEEE MTT-S International
Conference_Location :
Palo Alto, CA, USA
DOI :
10.1109/MWSYM.1987.1132536
