Title :
Robust H∞ control in nano-positioning
Author :
Chunag, Ning ; Petersen, Ian R.
Author_Institution :
Sch. of Eng. & Inf. Technol., Univ. of New South Wales, Canberra, ACT, Australia
Abstract :
This paper considers the use of robust H∞ tracking control in a nano-positioning system. The design of the controller takes into account of the existence of hysteresis in the piezoelectric actuator. Parameters in a nonlinear model of the system are obtained from experimental measurements. Experimental results show that the robust H∞ controller yields accurate tracking of displacement and also significantly reduces the hysteresis.
Keywords :
H∞ control; control system synthesis; hysteresis; nanopositioning; piezoelectric actuators; robust control; controller design; hysteresis; nanopositioning system; nonlinear model; piezoelectric actuator; robust H∞ control; robust H∞ tracking control; Equations; Frequency measurement; Hysteresis; Mathematical model; Piezoelectric actuators; Robustness; Voltage measurement;
Conference_Titel :
Control Applications (CCA), 2010 IEEE International Conference on
Conference_Location :
Yokohama
Print_ISBN :
978-1-4244-5362-7
Electronic_ISBN :
978-1-4244-5363-4
DOI :
10.1109/CCA.2010.5611252
