DocumentCode
2695212
Title
Time response and dynamic behavior of electrostatic driven RF MEMS capacitive switches for phase shifter applications
Author
He, Xun-jun ; Jin, Bo-shi ; Wu, Qun ; Yin, Jing-Hua
Author_Institution
Sch. of Electron. & Inf. Technol., Harbin Inst. of Technol.
fYear
2006
fDate
9-14 July 2006
Firstpage
1965
Lastpage
1968
Abstract
This paper analyzes the effects of the materials, the driven voltage, the switch height, the width of the CPW signal line and the quality factor on the switching time and the dynamic behavior of electrostatic driven RF MEMS capacitive switches for the microwave distributed MEMS shifters to reduce the switching time and the impact velocity, and increase the capacitive ratio
Keywords
Q-factor; coplanar waveguides; microswitches; microwave phase shifters; CPW signal line; capacitive ratio; driven voltage; dynamic behavior; electrostatic driven RF MEMS capacitive switches; impact velocity; microwave distributed MEMS shifters; phase shifter applications; quality factor; switch height; switching time; time response; Coplanar waveguides; Electrostatic analysis; Phase shifters; Q factor; RF signals; Radiofrequency microelectromechanical systems; Signal analysis; Switches; Time factors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation Society International Symposium 2006, IEEE
Conference_Location
Albuquerque, NM
Print_ISBN
1-4244-0123-2
Type
conf
DOI
10.1109/APS.2006.1710961
Filename
1710961
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