DocumentCode :
269600
Title :
2013 IEEE International Electron Device Meeting
Volume :
22
Issue :
2
fYear :
2013
fDate :
Apr-13
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2248331
Filename :
6490352
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=269600
