DocumentCode :
269605
Title :
CAS-international semiconductor conference
Volume :
22
Issue :
2
fYear :
2013
fDate :
Apr-13
Firstpage :
508
Lastpage :
508
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2254378
Filename :
6490358
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=269605
