DocumentCode

269610

Title

IEEE International SOI-3D subthreshold microelectronics technology unified conference

Volume

22

Issue

2

fYear

2013

fDate

Apr-13

Firstpage

507

Lastpage

507

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2013.2254379

Filename

6490359