DocumentCode :
269610
Title :
IEEE International SOI-3D subthreshold microelectronics technology unified conference
Volume :
22
Issue :
2
fYear :
2013
fDate :
Apr-13
Firstpage :
507
Lastpage :
507
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2013.2254379
Filename :
6490359
Link To Document :
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