Silicon microring resonator connected with submicorn comb actuator

Author

Takahashi, K. ; Kanamori, Y. ; Hane, K.

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

23

Lastpage

24

Abstract

A 500 nm wide 260 nm thick 63.4 mum long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750 nm to 50% maximum value (about 30 dB) at the voltages from 0 V to 28 V. Under the drop condition, the bandwidth of the drop signal was 0.5 nm, corresponding to the Q-value of 3100.

Keywords

integrated optics; micro-optomechanical devices; optical filters; optical resonators; optical waveguides; silicon; coupling efficiency; drop waveguides; low-loss suspension arms; silicon microring resonator; silicon microring waveguide; silicon photonics; submicorn comb actuator; voltage 0 V to 28 V; Actuators; Arm; Microactuators; Optical filters; Optical resonators; Optical waveguides; Resonator filters; Silicon; Throughput; Tunable circuits and devices; comb actuator; microring; silicon photonics; silicon waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607809

Filename

4607809