Title :
Analysis Of High Frequency Impedance Of Micromachined Magnetic Films Based On Bias Susceptibility Theory
Author :
Kikuchi, H. ; Takezawa, M. ; Yamaguchi, M. ; Arai, K.I.
Author_Institution :
Tohoku University
Keywords :
Frequency; Impedance; Magnetic analysis; Magnetic field measurement; Magnetic films; Magnetic sensors; Magnetic susceptibility; Permeability; Substrates; Thin film sensors;
Conference_Titel :
Magnetics Conference, 1997. Digests of INTERMAG '97., 1997 IEEE International
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
0-7803-3862-6
DOI :
10.1109/INTMAG.1997.598012