Title :
High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers
Author :
Lockhart, R. ; Tormen, M. ; Niedermann, P. ; Overstolz, T. ; Hoogerwerf, A. ; Stanley, R.P.
Author_Institution :
Swiss Center for Electron. & Microtechnol., Inc., Neuchatel
Abstract :
Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).
Keywords :
diffraction gratings; infrared spectrometers; laser accessories; laser cavity resonators; laser tuning; micro-optomechanical devices; optical filters; MEMS gratings; external cavity lasers; high-efficiency wavelength filtering; microspectrometers; near-infrared spectrum; size 1 mm; tuneable gratings; Biomembranes; Etching; Gratings; Laser tuning; Micromechanical devices; Optical devices; Optical filters; Optical tuning; Tunable circuits and devices; Wavelength measurement;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607814
