Title :
MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging
Author :
Piyawattanametha, W. ; Mandella, M.J. ; Ra, H. ; Liu, J.T. ; Garai, E. ; Kino, G.S. ; Solgaard, O. ; Contag, C.H.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA
Abstract :
We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).
Keywords :
bioMEMS; biomedical optical imaging; endoscopes; infrared imaging; micro-optomechanical devices; microactuators; optical microscopy; optical scanners; DC optical scan angles; axial resolutions; confocal microscopy; dual-axes confocal clinical endoscope; frequency 1.1 kHz; frequency 3.1 kHz; full-width-half-maximum transverse resolutions; maximum imaging rate; near infrared wavelength region; real time in vivo imaging; resonance frequencies; size 5.5 mm; two-dimensional MEMS scanner; vertical-comb actuators; wavelength 785 nm; Actuators; Endoscopes; Image resolution; In vivo; Micromechanical devices; Microscopy; Optical imaging; Packaging; Resonance; Resonant frequency;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607819
