Title :
Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application
Author :
Nakada, M. ; Takahashi, K. ; Higo, A. ; Fujita, H. ; Toshiyoshi, H.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo
Abstract :
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
Keywords :
CVD coatings; endoscopes; micro-optomechanical devices; optical design techniques; optical fabrication; optical materials; optical scanners; optical tomography; organic compounds; silicon-on-insulator; CVD-processed organic material; OCT endoscope application; SOI-MEMS process technology; chemical stability; elastic constant; electrostatic optical scanner; low-voltage MEMS scanner; parylene-hinged slow-scan optical scanner; resonance frequency; Chemical technology; Electrostatics; Endoscopes; Micromechanical devices; Optical design; Optical device fabrication; Organic chemicals; Organic materials; Resonance; Stability; endoscope; low resonance frequency; parylene; scanner;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607822
