Title :
Microspectrometer: From ideas to product
Author :
Herzig, Hans-Peter ; Scharf, Toralf ; Manzardo, Omar
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Neuchatel
Abstract :
Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.
Keywords :
infrared detectors; infrared spectrometers; micro-optomechanical devices; MEMS spectrometers; microspectrometer; miniaturized systems; near infrared sensing systems; spectroscopy; Energy consumption; Infrared spectra; Micromechanical devices; Mirrors; Optical interferometry; Optical sensors; Prototypes; Spectroscopy; Stability; Voltage;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607827
