Title :
Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators
Author :
Milne, J. ; Dell, J. ; Keating, A. ; Schuler, L. ; Faraone, L.
Author_Institution :
Microelectron. Res. Group, Univ. of Western Australia, Perth, WA
Abstract :
Wide spectral tuning from 1620 nm to 2425 nm has been achieved in a MEMS-based tunable Fabry-Perot filter. Fixed-fixed beam actuators were used to extend the tuning beyond the inherent limit of a parallel plate actuator.
Keywords :
electric actuators; micro-optomechanical devices; optical filters; optical tuning; MEMS-based tunable Fabry-Perot filter; fixed-fixed beam actuators; parallel plate actuator; spectral tuning; Actuators; Compressive stress; Electrodes; Fabry-Perot; Mirrors; Optical filters; Optical tuning; Silicon; Voltage; Wavelength measurement; Electrostatic actuation; Fabry-Pérot etalon; Micro-electromechanical systems (MEMS); tunable filter;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607831
