A high-power handling MEMS optical scanner for display applications

Author

Ohira, Yasutaka ; Checkovskiy, Aleksandr ; Yamanoi, Toshio ; Endo, Takashi ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Tokyo

fYear

2008

fDate

11-14 Aug. 2008

Firstpage

70

Lastpage

71

Abstract

This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.

Keywords

micro-optomechanical devices; mirrors; optical scanners; solid lasers; three-dimensional displays; MEMS optical scanner; YAG-laser beam; dielectric-film coated mirror; electrostatic MEMS scanner platform; laser 3D image display; micro electro mechanical systems optical scanner; optomechanical combination; power 5 W; Dielectrics; Laser beams; Mechanical systems; Micromechanical devices; Optical design; Optical design techniques; Optical device fabrication; Optical pulses; Optical reflection; Three dimensional displays; 3-D Display; YAG-laser; hybrid MEMS; laser induced breakdown;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on

Conference_Location

Freiburg

Print_ISBN

978-1-4244-1917-3

Electronic_ISBN

978-1-4244-1918-0

Type

conf

DOI

10.1109/OMEMS.2008.4607833

Filename

4607833