Title :
A high-power handling MEMS optical scanner for display applications
Author :
Ohira, Yasutaka ; Checkovskiy, Aleksandr ; Yamanoi, Toshio ; Endo, Takashi ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Tokyo
Abstract :
This paper reports a design and fabrication technique of high-power handling MEMS (micro electro mechanical systems) optical scanner for laser 3D image display application. The MEMS scanner is designed to control the reflection of high-power YAG-laser beam of 5 W (0.5 mW/pulse) by the optomechanical combination of a dielectric-film coated mirror cube and an electrostatic MEMS scanner platform.
Keywords :
micro-optomechanical devices; mirrors; optical scanners; solid lasers; three-dimensional displays; MEMS optical scanner; YAG-laser beam; dielectric-film coated mirror; electrostatic MEMS scanner platform; laser 3D image display; micro electro mechanical systems optical scanner; optomechanical combination; power 5 W; Dielectrics; Laser beams; Mechanical systems; Micromechanical devices; Optical design; Optical design techniques; Optical device fabrication; Optical pulses; Optical reflection; Three dimensional displays; 3-D Display; YAG-laser; hybrid MEMS; laser induced breakdown;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607833
