Title :
Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner
Author :
Jung, Il Woong ; Mallick, Shrestha Basu ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA
Abstract :
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.
Keywords :
micromirrors; optical scanners; photonic crystals; broadband MEMS scanner; frequency 2.13 kHz; monolithic silicon photonic crystal mirror; monolithic structure; voltage 67 V; wavelength 1520 nm to 1620 nm; Etching; Fabrication; Micromechanical devices; Mirrors; Oxidation; Personal communication networks; Photonic crystals; Protection; Reflectivity; Silicon; GOPHER; MEMS scanner; Photonic crystal; broad-band; monolithic;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607836
