Title :
3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement
Author :
Sandner, Thilo ; Wildenhain, Michael ; Klose, Thomas ; Schenk, Harald ; Schwarzer, Stefan ; Hinkov, Vladimir ; Hofler, H. ; Wölfelschneider, Harald
Author_Institution :
Micro Scanner Devices, Fraunhofer Inst. for Photonic Microsyst., Dresden
Abstract :
We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system weight. We show first results using a single-mirror prototype.
Keywords :
laser ranging; micromirrors; optical radar; optical scanners; 3D imaging; MEMS mirror arrays; laser distance measurement; laser radar; reception apertures; single-mirror prototype; Apertures; Distance measurement; Laser radar; Micromechanical devices; Mirrors; Optical arrays; Optical scattering; Optical sensors; Resonance; Surface emitting lasers; MEMS; high speed; large aperture; laser radar; mirror array; scanning;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607837
