• DocumentCode
    2696717
  • Title

    MEMS deformable mirrors for adaptive optics using single crystal PMN-PT

  • Author

    Park, Hyunkyu ; Horsley, David A.

  • Author_Institution
    Mech. & Aeronaut. Eng., California Univ., Davis, CA
  • fYear
    2008
  • fDate
    11-14 Aug. 2008
  • Firstpage
    90
  • Lastpage
    91
  • Abstract
    A MEMS-based deformable mirror constructed using single-crystal PMN-PT for use in ophthalmologic adaptive optics is presented. The fabrication process and the results of characterization of the DM are described. A large stroke and high operating bandwidth assure that the DM can be a promising wavefront corrector.
  • Keywords
    adaptive optics; lead compounds; micromirrors; ophthalmic lenses; MEMS deformable mirrors; PMN-PbTiO3; ophthalmologic adaptive optics; single crystal PMN-PT; wavefront corrector; Adaptive optics; Apertures; Chromium; Delta modulation; Electrodes; Fabrication; Gold; Hafnium; Micromechanical devices; Mirrors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • Conference_Location
    Freiburg
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    978-1-4244-1918-0
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607843
  • Filename
    4607843
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2696717