Title :
A micromachined vibratory sub-wavelength diffraction grating laser scanner
Author :
Du, Yu ; Zhou, Guangya ; Cheo, Kelvin K L ; Zhang, Qingxin ; Feng, Hanhua ; Chau, Fook Siong
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
Keywords :
diffraction gratings; micro-optomechanical devices; micromachining; optical scanners; MEMS based in-plane vibratory subwavelength diffraction grating scanner; diffraction efficiency; frequency 20.35 kHz; laser scanner; micromachining; microscanners; optical scan angle; scanning frequency; Diffraction gratings; Frequency; Laser beams; Laser theory; Micromechanical devices; Optical beams; Optical diffraction; Optical polarization; Optical resonators; Silicon on insulator technology; Diffraction grating; Micro-opto-electromechanical systems (MOEMS); Micro-scanners;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607847
