Title :
Mirror-substrate AlGaInP LEDs for large-area emitter applications
Author :
Wuu, D.S. ; Horng, R.H.
Author_Institution :
Dept. of Mater. Eng., Nat. Chung-Hsing Univ., Taichung, Taiwan
Abstract :
In a previous study, we reported a highly efficient AlGaInP light-emitting diode (LED) with a Au/AuBe/SiO2/Si mirror substrate (MS) fabricated by wafer bonding, where a planar electrode structure is used. In view of the more efficient epilayer area utilized, AlGaInP/mirror/barrier/Si LEDs with vertical electrodes are proposed in this work. A variety of barrier layers (Pt/Ti, TaN/Ta, and TiN/Ti) have been incorporated into the mirror structure. The quality of the Au/AuBe mirror after bonding is known to be a key issue in obtaining high performance MS-LEDs. The large-area AlGaInP emitters (1.2 × 1.2 mm2) show that its luminous intensity and output power can reach 6 candelas and 81 mW under an injection current of 1 A and 300 mA, respectively. The dominant wavelength shifts ∼5 nm under an injection current from 20 mA to 1 A. Based on these results, it can be concluded that the wafer-bonded AlGaInP epilayers with mirror substrates have high potential in high-brightness, high-power and large-area LED applications.
Keywords :
III-V semiconductors; aluminium compounds; beryllium alloys; electrodes; elemental semiconductors; gallium compounds; gold; gold alloys; indium compounds; light emitting diodes; mirrors; semiconductor epitaxial layers; silicon; silicon compounds; tantalum; tantalum compounds; titanium; titanium compounds; wafer bonding; 20 mA to 1 A; 81 mW; AlGaInP light-emitting diode; AlGaInP-Si; AlGaInP/mirror/barrier/Si LEDs; Au-AuBe; Au/AuBe mirror; Au/AuBe/SiO2/Si mirror substrate; Pt-Ti; Si; TaN-Ta; TiN-Ti; epilayer area; injection current; large-area AlGaInP emitters; large-area emitter applications; luminous intensity; mirror structure; mirror-substrate AlGaInP LEDs; planar electrode structure; vertical electrodes; wafer bonding; wafer-bonded AlGaInP epilayers; Crystallography; Distributed Bragg reflectors; Electrodes; Gallium arsenide; Gold; Light emitting diodes; Mirrors; Substrates; Temperature; Wafer bonding;
Conference_Titel :
Optoelectronics, Proceedings of the Sixth Chinese Symposium
Print_ISBN :
0-7803-7887-3
DOI :
10.1109/COS.2003.1278174