• DocumentCode
    2696894
  • Title

    Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

  • Author

    Chiu, Yi ; Huang, Wei-Zhi ; Wu, Jhong-Wei ; Chiou, Jin-Chern ; Shieh, Han-Ping D.

  • Author_Institution
    Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
  • fYear
    2008
  • fDate
    11-14 Aug. 2008
  • Firstpage
    110
  • Lastpage
    111
  • Abstract
    Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.
  • Keywords
    micromirrors; optical fabrication; silicon-on-insulator; wafer bonding; SOI wafers; SU-8 mechanisms; Si; micromirrors; one-push operation; silicon-on-insulator wafers; Assembly systems; Control engineering; Displays; Electronics packaging; Fasteners; Micromechanical devices; Mirrors; Optical films; Photonics; Probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • Conference_Location
    Freiburg
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    978-1-4244-1918-0
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607853
  • Filename
    4607853
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2696894