Title :
Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation
Author :
Chiu, Yi ; Huang, Wei-Zhi ; Wu, Jhong-Wei ; Chiou, Jin-Chern ; Shieh, Han-Ping D.
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.
Keywords :
micromirrors; optical fabrication; silicon-on-insulator; wafer bonding; SOI wafers; SU-8 mechanisms; Si; micromirrors; one-push operation; silicon-on-insulator wafers; Assembly systems; Control engineering; Displays; Electronics packaging; Fasteners; Micromechanical devices; Mirrors; Optical films; Photonics; Probes;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607853
