Low operation voltage non self-emissive MEMS color filter pixels

A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton´s rings´ size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.