Title :
Simulation-based design of a MEMS X-ray optic for X-ray astronomy
Author :
Koshiishi, M. ; Ezoe, Y. ; Mitsuishi, I. ; Mita, M. ; Mitsuda, K. ; Takano, T. ; Maeda, R.
Author_Institution :
Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Tokyo
Abstract :
An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.
Keywords :
X-ray astronomy; X-ray imaging; X-ray optics; micro-optomechanical devices; optical design techniques; MEMS technologies; X-ray astronomy; X-ray images; simulation-based design; ultralight-weight X-ray optic; Astronomy; Biomedical optical imaging; Focusing; Geometrical optics; Micromechanical devices; Mirrors; Optical design; Optical reflection; Optical refraction; X-ray imaging;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607859
