Title :
The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film
Author :
Hsu, Chia-Pao ; Chen, Wen-Chien ; Tang, Tsung-Lin ; Yip, Ming-Chuen ; Fang, Weiluen
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
Abstract :
A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.
Keywords :
electroplating; elemental semiconductors; integrated optics; magneto-optical devices; magnetostatic wave devices; metallic thin films; micro-optomechanical devices; micromirrors; nickel; optical fabrication; optical scanners; silicon; Ni; Ni film; Si; backside electroplating; magnetostatic driving force; magnetostatic-drive microscanner; microscanning mirror; single-crystal silicon; single-crystal-Si microscanner; two-axis microscanner; Electromagnetic forces; Electrostatics; Etching; Frequency; Magnetostatics; Mirrors; Optical device fabrication; Optical devices; Optical films; Springs;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607874
