Title :
CMOS-SOI-MEMS transistor (TMOS) for infrared imaging
Author :
Gitelman, Leonid ; Gutman, Zivit ; Bar-Lev, Sharon ; Stolyarova, Sara ; Nemirovsky, Yael
Author_Institution :
Dept. of Electr. Eng., Technion - Israel Inst. of Technol., Haifa
Abstract :
The novel concept of thermally isolated CMOS-SOI-MEMS transistor serving as IR detector (TMOS) is presented and characterized, showing high potential for thermal imaging, allowing long integration time because of negligible self heating.
Keywords :
CMOS integrated circuits; MOSFET; infrared detectors; infrared imaging; micromechanical devices; silicon-on-insulator; CMOS-SOI-MEMS transistor; infrared detector; infrared imaging; thermal imaging; thermal isolation; Bolometers; CMOS technology; Etching; Frequency measurement; Heating; Infrared imaging; MOSFETs; Sensor arrays; Thermal conductivity; Thermal factors;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607884
