Title :
Radiation heat transfer dominated microbolometers
Author :
Gawarikar, Anand S. ; Shea, Ryan P. ; Mehdaoui, Alexandre ; Talghader, Joseph J.
Author_Institution :
Dept. of Electr. Eng., Univ. of Minnesota, Minneapolis, MN
Abstract :
Radiation heat transfer limited thermal conductance represents the ultimate lower limit of the thermal isolation achievable in a microbolometer. A microbolometer structure with radiation limited thermal conductance has been fabricated and its operation demonstrated.
Keywords :
bolometers; heat conduction; heat radiation; microsensors; microbolometers; radiation heat transfer; thermal conductance; thermal isolation; Bolometers; Electrical resistance measurement; Heat engines; Heat transfer; Leg; Resistance heating; Temperature; Thermal conductivity; Thermal engineering; Thermal resistance;
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Conference_Location :
Freiburg
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
978-1-4244-1918-0
DOI :
10.1109/OMEMS.2008.4607887
