MMI optical couplers and switches with SOI technology

Author

Yu, Jinzhong ; Wang, Xiaolong ; Liu, Jingwei ; Yan, Qinfeng ; Xia, Jinsong ; Fan, Zhongchao ; Wang, Zhangtao ; Chen, Shaowu

Author_Institution

Inst. of Semicond., Chinese Acad. of Sci., Beijing, China

fYear

2003

fDate

12-14 Sept. 2003

Firstpage

251

Lastpage

254

Abstract

MMI (multimode interference) coupler, modulator and switch based on SOI (silicon-on-insulator) have been become more and more attractive in optical systems since they show important performances. SiO₂ thin cladding layers (<1.0 μm) can be used in SOI waveguide due to the large index step between Si and SiO₂, making them compatible with the VLSI technology. The design and fabrication of multimode interference (MMI) optical coupler, modulator and switch in SOI technology are presented in the paper. The results demonstrated that the modulator has an extinction ratio of -11.0 dB and excess loss of -2.5 dB, while the optical switch has a crosstalk of -12.5 dB and responding time of less than 20 -s.

Keywords

VLSI; claddings; integrated optics; light interference; optical couplers; optical crosstalk; optical design techniques; optical fabrication; optical modulation; optical switches; refractive index; silicon-on-insulator; -2.5 dB; MMI optical couplers; SOI technology; Si-SiO₂; SiO₂ thin cladding layers; VLSI technology; crosstalk; extinction ratio; index step; modulator; multimode interference; optical design; optical fabrication; optical switches; silicon-on-insulator; Couplers; Interference; Optical crosstalk; Optical design; Optical device fabrication; Optical modulation; Optical switches; Optical waveguides; Silicon on insulator technology; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronics, Proceedings of the Sixth Chinese Symposium

Print_ISBN

0-7803-7887-3

Type

conf

DOI

10.1109/COS.2003.1278216

Filename

1278216