Title :
MMI optical couplers and switches with SOI technology
Author :
Yu, Jinzhong ; Wang, Xiaolong ; Liu, Jingwei ; Yan, Qinfeng ; Xia, Jinsong ; Fan, Zhongchao ; Wang, Zhangtao ; Chen, Shaowu
Author_Institution :
Inst. of Semicond., Chinese Acad. of Sci., Beijing, China
Abstract :
MMI (multimode interference) coupler, modulator and switch based on SOI (silicon-on-insulator) have been become more and more attractive in optical systems since they show important performances. SiO2 thin cladding layers (<1.0 μm) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. The design and fabrication of multimode interference (MMI) optical coupler, modulator and switch in SOI technology are presented in the paper. The results demonstrated that the modulator has an extinction ratio of -11.0 dB and excess loss of -2.5 dB, while the optical switch has a crosstalk of -12.5 dB and responding time of less than 20 -s.
Keywords :
VLSI; claddings; integrated optics; light interference; optical couplers; optical crosstalk; optical design techniques; optical fabrication; optical modulation; optical switches; refractive index; silicon-on-insulator; -2.5 dB; MMI optical couplers; SOI technology; Si-SiO2; SiO2 thin cladding layers; VLSI technology; crosstalk; extinction ratio; index step; modulator; multimode interference; optical design; optical fabrication; optical switches; silicon-on-insulator; Couplers; Interference; Optical crosstalk; Optical design; Optical device fabrication; Optical modulation; Optical switches; Optical waveguides; Silicon on insulator technology; Very large scale integration;
Conference_Titel :
Optoelectronics, Proceedings of the Sixth Chinese Symposium
Print_ISBN :
0-7803-7887-3
DOI :
10.1109/COS.2003.1278216
