مرکز منطقه ای اطلاع رساني علوم و فناوري - Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

DocumentCode :

269751

Title :

Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

Author :

Wegner, Thomas ; KuÌˆllig, Christian ; Meichsner, JuÌˆrgen

Author_Institution :

Univ. of Greifswald, Greifswald, Germany

Volume :

Issue :

fYear :

2014

fDate :

Oct. 2014

Firstpage :

2830

Lastpage :

2831

Abstract :

Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heating mechanisms were found during the E-H-mode transition.

Keywords :

high-frequency discharges; oxygen; plasma diagnostics; plasma instability; plasma radiofrequency heating; E-H-mode transition; O; electron heating mechanisms; inductively coupled radiofrequency oxygen discharges; optical excitation patterns; phase-resolved optical emission spectroscopy; space-resolved optical emission spectroscopy; Coils; Discharges (electric); Heating; Integrated optics; Plasmas; Radio frequency; Stimulated emission; ICP; optical spectroscopy; oxygen radio frequency (RF) plasma; oxygen radio frequency (RF) plasma.;

fLanguage :

English

Journal_Title :

Plasma Science, IEEE Transactions on

Publisher :

ieee

ISSN :

0093-3813

Type :

jour

DOI :

10.1109/TPS.2014.2310501

Filename :

6782727

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=269751