• DocumentCode
    269751
  • Title

    Excitation Patterns and Heating Mechanisms During E-H-Mode Transition in Inductively Coupled RF Oxygen Discharges

  • Author

    Wegner, Thomas ; Küllig, Christian ; Meichsner, Jürgen

  • Author_Institution
    Univ. of Greifswald, Greifswald, Germany
  • Volume
    42
  • Issue
    10
  • fYear
    2014
  • fDate
    Oct. 2014
  • Firstpage
    2830
  • Lastpage
    2831
  • Abstract
    Optical excitation patterns and electron heating mechanisms were investigated in inductively coupled radio frequency oxygen discharges by phase and space resolved optical emission spectroscopy. Four excitation patterns due to different electron heating mechanisms were found during the E-H-mode transition.
  • Keywords
    high-frequency discharges; oxygen; plasma diagnostics; plasma instability; plasma radiofrequency heating; E-H-mode transition; O; electron heating mechanisms; inductively coupled radiofrequency oxygen discharges; optical excitation patterns; phase-resolved optical emission spectroscopy; space-resolved optical emission spectroscopy; Coils; Discharges (electric); Heating; Integrated optics; Plasmas; Radio frequency; Stimulated emission; ICP; optical spectroscopy; oxygen radio frequency (RF) plasma; oxygen radio frequency (RF) plasma.;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2014.2310501
  • Filename
    6782727
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=269751