Fuzzy fault tree analysis of mask stage

Author

Zeng, Jidong ; Ling, Dan ; Liu, Yu ; Wang, Song ; Wu, Chuanhao

Author_Institution

Sch. of Mechatron. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2012

fDate

15-18 June 2012

Firstpage

274

Lastpage

277

Abstract

Fault tree analysis (FTA) is a top-down approach for failure analysis, starting with a potential undesirable event called a TOP event, and then determining all the ways it can happen. FTA is the most commonly used technique for causal analysis in risk and reliability studies. Mask stage an important part of lithography. In this paper, Fault Tree of the mask stage is built with “Mask stage doesn´t work” as the top event. Quantitative assessment and qualitative analysis based on Fuzzy Logic are carried out. And the importance of bottom events is calculated.

Keywords

fault trees; fuzzy logic; fuzzy set theory; masks; nanolithography; soft lithography; TOP event; causal analysis; failure analysis; fuzzy fault tree analysis; fuzzy logic; mask stage; qualitative analysis; quantitative assessment; reliability studies; Cooling; Educational institutions; Fault trees; Lithography; Logic gates; Probability; Reliability; fuzzy fault tree; fuzzy number; mask stage; membership function;

fLanguage

English

Publisher

ieee

Conference_Titel

Quality, Reliability, Risk, Maintenance, and Safety Engineering (ICQR2MSE), 2012 International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4673-0786-4

Type

conf

DOI

10.1109/ICQR2MSE.2012.6246234

Filename

6246234