• DocumentCode
    2698434
  • Title

    Structural and electrical properties of SiO2 thin films produced by the different methods

  • Author

    Pérez-Bueno, J.J. ; Ramirez-Bon, R. ; Espinoza-Beltran, F. ; Vorobiev, Yu.V. ; Gonzalez-Hernández, J.

  • Author_Institution
    CINVESTAV-IPN
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    17
  • Lastpage
    20
  • Keywords
    Copper; Dielectric breakdown; Dielectric measurements; Dielectric substrates; Ethanol; Optical films; Plasma temperature; Semiconductor films; Sputtering; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
  • Print_ISBN
    0-7803-5939-9
  • Type

    conf

  • DOI
    10.1109/ASDAM.2000.889444
  • Filename
    889444
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2698434